管理ログ(内部向け詳細版はこちら

日付 Date
記入者 Writer
維持 Maintenance
実施業者 company
2023/4/13
Sekine, Dibyesh
Replaced mechanical sealing oil of MBP
2022/1/17
Sekine, Murohara
Repairing the floor damaged by dichloromethane
(株)阿部内装
2021/12/14
Sekine, Kawabata
Maintanance of refrigerator for DP
Mitsubishi Electric Building Techno-service
2019/10/28
Nishii
PLC DI card (second hand) replacement by ULVAC
ULVAC
2019/10/24
Hamada
Ar gas replacement
2019/10/03
Bak, Nishii
RP2 oil replaced with R-4 oil
2019/10/03
Bak, Nishii
Cooling water cleaning
2019/10/03
Hamada
Cooling water bypass valve adjust
2017/04/21
Hamada, Mizukawa
Location of the flanges(with a window and with connectors) are switched, and cleaned.
2017/03/21
Bak, Hamada, Mizukawa
Pump room was cleaned
2017/03/24
Bak, Hamada, Mizukawa
Cooling water tower was cleaned.
2016/10/25
Hamada
Cooling water tower cleaning by a company
2016/08/06
Hamada
Cooling water line is replaced
2016/08/05
Hamada, Mizukawa
RP operation with water blast valve open
2016/08/04
Hamada, Mizukawa
RP operation with water blast valve open
2016/08/03
Hamada, Mizukawa
RP operation with water blast valve open
2016/08/02
Hamada, Mizukawa
RP operation with water blast valve open
2016/07/28
Hamada, Mizukawa
RP operation with water blast valve open
2016/07/26
Hamada, Mizukawa
RP operation with water blast valve open
2016/07/21
Hamada, Mizukawa
RP operation with water blast valve open
2016/07/19
Hamada, Mizukawa
RP1, RP2 oil whole replacement
2016/07/05
Bak, Hamada, Mizukawa
Cooling water tube going through inside chamber was broken due to deterioration.
2016/06/15
Bak
RP2 oil is added
2016/05/17
Bak, Hamada
RP operation with water blast valve open.
2016/05/16
Bak, Hamada, Mizukawa
Cooling water tube going through inside chamber was broken due to weak material, and water was cleaned
2016/04/01-31
Bak
Seed Lab. : LN2 shroud panel is attached.
2016/04/01-31
Bak
Seed Lab. : Trolley and crane are equipped.
2016/04/01-31
Bak
Seed Lab. : Thermal stage (-10 ~ +60 oC) is installed.
2016/04/01-31
Bak
Seed Lab. : 20 in Cryopump is attached.
2016/04/01-31
Bak
Seed Lab. : Chamber door movement range is increased.
2016/01/08
Bak, Hamada
RP1 vibration is reduced by adjusting a jack stand
2016/01/08
Bak, Hamada
RP1 bellows is replaced
2015/12/10
Bak, Hirano, Hamada, Sainadh
MBP oil is replaced
2015/11/07
Hirano, Hamada
RP2 oil is replaced
2015/10/15
Bak, Hamada
RP1 vibration is reduced by adjusting a jack stand
2015/10/02
Bak
RP1 overhaul, and old parts are replaced
2015/08/13
Bak
RP1 oil replaced
2015/08/11
Bak
RP1 rotor cover fixed
2015/08/11
Bak
RP1 mist trap filter element replaced
2015/07/28
Bak, Hirano
RP2 oil replaced
2015/07/28
Bak, Hirano
RP1, RP2 oil filters cleaned